{"id":3420,"date":"2021-11-11T11:02:08","date_gmt":"2021-11-11T03:02:08","guid":{"rendered":"\/\/www.schoolhousefamilies.com\/%e5%8d%95%e6%99%b6%e7%a1%85%e7%89%87-mems-%e7%a1%85%e7%89%87\/"},"modified":"2023-06-25T00:13:29","modified_gmt":"2023-06-24T16:13:29","slug":"danjingguipianmemsguipian","status":"publish","type":"post","link":"\/\/www.schoolhousefamilies.com\/danjingguipianmemsguipian\/","title":{"rendered":"\u5355\u6676\u7845\u7247\u2014\u2014MEMS \u7845\u7247"},"content":{"rendered":"

MEMS \u7845\u7247<\/span><\/strong><\/p>\n

       \u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS, Micro-Electro-Mechanical System\uff09\uff0c\u4e5f\u53eb\u505a\u5fae\u7535\u5b50\u673a\u68b0\u7cfb\u7edf\u3001\u5fae\u7cfb\u7edf\u3001\u5fae\u673a\u68b0\u7b49\uff0c\u6307\u5c3a\u5bf8\u5728\u51e0\u6beb\u7c73\u4e43\u81f3\u66f4\u5c0f\u7684\u9ad8\u79d1\u6280\u88c5\u7f6e\u3002<\/span><\/p>\n

 <\/span>\u5fae\u673a\u7535\u7cfb\u7edf\u5176\u5185\u90e8\u7ed3\u6784\u4e00\u822c\u5728\u5fae\u7c73\u751a\u81f3\u7eb3\u7c73\u91cf\u7ea7\uff0c\u662f\u4e00\u4e2a\u72ec\u7acb\u7684\u667a\u80fd\u7cfb\u7edf\u3002<\/span><\/p>\n

       \u5fae\u673a\u7535\u7cfb\u7edf\u662f\u5728\u5fae\u7535\u5b50\u6280\u672f\uff08\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\uff09\u57fa\u7840\u4e0a\u53d1\u5c55\u8d77\u6765\u7684\uff0c\u878d\u5408\u4e86\u5149\u523b\u3001\u8150\u8680\u3001\u8584\u819c\u3001LIGA\u3001\u7845\u5fae\u52a0\u5de5\u3001\u975e\u7845\u5fae\u52a0<\/span>\u5de5\u548c\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u7b49\u6280\u672f\u5236\u4f5c\u7684\u9ad8\u79d1\u6280\u7535\u5b50\u673a\u68b0\u5668\u4ef6\u3002<\/span><\/span><\/p>\n


<\/span><\/span><\/p>\n

       \u5fae\u673a\u7535\u7cfb\u7edf\u662f\u96c6\u5fae\u4f20\u611f\u5668\u3001\u5fae\u6267\u884c\u5668\u3001\u5fae\u673a\u68b0\u7ed3\u6784\u3001\u5fae\u7535\u6e90\u5fae\u80fd\u6e90\u3001\u4fe1\u53f7\u5904\u7406\u548c\u63a7\u5236\u7535\u8def\u3001\u9ad8\u6027\u80fd\u7535\u5b50\u96c6\u6210\u5668\u4ef6\u3001\u63a5\u53e3\u3001\u901a\u4fe1\u7b49\u4e8e\u4e00\u4f53\u7684\u5fae\u578b\u5668\u4ef6\u6216\u7cfb\u7edf\u3002MEMS\u662f\u4e00\u9879\u9769\u547d\u6027\u7684\u65b0\u6280\u672f\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u9ad8\u65b0\u6280\u672f\u4ea7\u4e1a\uff0c\u662f\u4e00\u9879\u5173\u7cfb\u5230\u56fd\u5bb6\u7684\u79d1\u6280\u53d1\u5c55\u3001\u7ecf\u6d4e\u7e41\u8363\u548c\u56fd\u9632\u5b89\u5168\u7684\u5173\u952e\u6280\u672f\u3002 [1] <\/span><\/p>\n


<\/span><\/p>\n

       MEMS\u4fa7\u91cd\u4e8e\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\uff0c\u6d89\u53ca\u5fae\u7535\u5b50\u3001\u6750\u6599\u3001\u529b\u5b66\u3001\u5316\u5b66\u3001\u673a\u68b0\u5b66\u8bf8\u591a\u5b66\u79d1\u9886\u57df\u3002\u5b83\u7684\u5b66\u79d1\u9762\u6db5\u76d6\u5fae\u5c3a\u5ea6\u4e0b\u7684\u529b\u3001\u7535\u3001\u5149\u3001\u78c1\u3001\u58f0\u3001\u8868\u9762\u7b49\u7269\u7406\u3001\u5316\u5b66\u3001\u673a\u68b0\u5b66\u7684\u5404\u5206\u652f\u3002 [2] <\/span><\/p>\n


<\/span><\/p>\n

       \u5e38\u89c1\u7684\u4ea7\u54c1\u5305\u62ecMEMS\u52a0\u901f\u5ea6\u8ba1\u3001MEMS\u9ea6\u514b\u98ce\u3001\u5fae\u9a6c\u8fbe\u3001\u5fae\u6cf5\u3001\u5fae\u632f\u5b50\u3001MEMS\u5149\u5b66\u4f20\u611f\u5668\u3001MEMS\u538b\u529b\u4f20\u611f\u5668\u3001MEMS\u9640\u87ba\u4eea\u3001MEMS\u6e7f\u5ea6\u4f20\u611f\u5668\u3001MEMS\u6c14\u4f53\u4f20\u611f\u5668\u7b49\u7b49\u4ee5\u53ca\u5b83\u4eec\u7684\u96c6\u6210\u4ea7\u54c1\u3002<\/span><\/strong><\/span>
 <\/span><\/div>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
<\/td>\nCzochralski<\/span><\/td>\nFloat Zone<\/span><\/td>\nFloat Zone<\/span><\/td>\n<\/tr>\n
Diameter<\/span><\/td>\n100-150 mm<\/span><\/td>\n50-150 mm*<\/span><\/td>\n100-150 mm*<\/span><\/td>\n<\/tr>\n
Crystal orientation<\/span><\/td>\n<100> <111><\/span><\/td>\n<100> <111><\/span><\/td>\n<100> <111><\/span><\/td>\n<\/tr>\n
Orientation accuracy<\/span><\/td>\n<0.5\u00b0<\/span><\/td>\n<0.5\u00b0<\/span><\/td>\n<0.5\u00b0<\/span><\/td>\n<\/tr>\n
Type and dopant<\/span><\/td>\nUndoped, n-type,
p-type<\/span><\/td>\n		Undoped, n-type,
p-type<\/span><\/td>\n		Undoped, n-type,
p-type<\/span><\/td>\n<\/tr>\n
Dopant<\/span><\/td>\nAs, B, P, and Sb<\/span><\/td>\nP, B<\/span><\/td>\nP, B<\/span><\/td>\n<\/tr>\n
Bulk resistivity<\/span><\/td>\n0.001-60<\/span><\/td>\n1-30,000<\/span><\/td>\n1-30,000<\/span><\/td>\n<\/tr>\n
Bulk lifetime<\/span><\/td>\n>20 \u00b5s<\/span><\/td>\n>1,000 \u00b5s<\/span><\/td>\n>1,000 \u00b5s<\/span><\/td>\n<\/tr>\n
Wafer thickness<\/span><\/td>\n200-1,500 \u00b5m<\/span><\/td>\n200-1,500 \u00b5m<\/span><\/td>\n200-1,500 \u00b5m<\/span><\/td>\n<\/tr>\n
Wafer thickness
tolerance<\/span><\/td>\n		\u00b115 \u00b5m<\/span><\/td>\n\u00b115 \u00b5m<\/span><\/td>\n\u00b15 \u00b5m<\/span><\/td>\n<\/tr>\n
TTV<\/span><\/td>\n<5 \u00b5m or <9 \u00b5m<\/span><\/td>\n<5 \u00b5m or <9 \u00b5m<\/span><\/td>\n<2.5 \u00b5m<\/span><\/td>\n<\/tr>\n
TIR<\/span><\/td>\n<3 \u00b5m<\/span><\/td>\n<3 \u00b5m<\/span><\/td>\n<1 \u00b5m<\/span><\/td>\n<\/tr>\n
Wafer surface finish<\/span><\/td>\nSingle side polished,
Double side polished<\/span><\/td>\n		Single side
polished<\/span><\/td>\n		Double side
polished<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

<\/p>\n

       MEMS(\u5fae\u673a\u7535\u7cfb\u7edf)\u6700\u521d\u5927\u91cf\u7528\u4e8e\u6c7d\u8f66\u5b89\u5168\u6c14\u56ca\uff0c\u800c\u540e\u4ee5MEMS\u4f20\u611f\u5668\u7684\u5f62\u5f0f\u88ab\u5927\u91cf\u5e94\u7528\u5728\u6c7d\u8f66\u7684\u5404\u4e2a\u9886\u57df\uff0c\u968f\u7740MEMS\u6280\u672f\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\uff0c\u4ee5\u53ca\u5e94\u7528\u7ec8\u7aef\u201c\u8f7b\u3001\u8584\u3001\u77ed\u3001\u5c0f\u201d\u7684\u7279\u70b9\uff0c\u5bf9\u5c0f\u4f53\u79ef\u9ad8\u6027\u80fd\u7684MEMS\u4ea7\u54c1\u9700\u6c42\u589e\u52bf\u8fc5\u731b\uff0c\u6d88\u8d39\u7535\u5b50\u3001\u533b\u7597\u7b49\u9886\u57df\u4e5f\u5927\u91cf\u51fa\u73b0\u4e86MEMS\u4ea7\u54c1\u7684\u8eab\u5f71\u3002<\/span><\/p>\n


<\/span><\/p>\n<\/div>\n

1\uff09\u5fae\u578b\u5316\uff1aMEMS\u5668\u4ef6\u4f53\u79ef\u5c0f\u3001\u91cd\u91cf\u8f7b\u3001\u8017\u80fd\u4f4e<\/span>\u5fae\u673a\u7535\u7cfb\u7edf\u3001\u60ef\u6027\u5c0f\u3001\u8c10\u632f\u9891\u7387\u9ad8\u3001\u54cd\u5e94\u65f6\u95f4\u77ed\u3002<\/span><\/span><\/div>\n
2\uff09\u4ee5\u7845\u4e3a\u4e3b\u8981\u6750\u6599\uff0c\u673a\u68b0\u7535\u5668\u6027\u80fd\u4f18\u826f\uff1a\u7845\u7684\u5f3a\u5ea6\u3001\u786c\u5ea6\u548c\u6768\u6c0f\u6a21\u91cf\u4e0e\u94c1\u76f8\u5f53\uff0c\u5bc6\u5ea6\u7c7b\u4f3c\u94dd\uff0c\u70ed\u4f20\u5bfc\u7387\u63a5\u8fd1\u94bc\u548c\u94a8\u3002<\/span><\/div>\n
3\uff09\u6279\u91cf\u751f\u4ea7\uff1a\u7528\u7845\u5fae\u52a0\u5de5\u5de5\u827a\u5728\u4e00\u7247\u7845\u7247\u4e0a\u53ef\u540c\u65f6\u5236\u9020\u6210\u767e\u4e0a\u5343\u4e2a\u5fae\u578b\u673a\u7535\u88c5\u7f6e\u6216\u5b8c\u6574\u7684MEMS\u3002\u6279\u91cf\u751f\u4ea7\u53ef\u5927\u5927\u964d\u4f4e\u751f\u4ea7\u6210\u672c\u3002<\/span><\/div>\n
4\uff09\u96c6\u6210\u5316\uff1a\u53ef\u4ee5\u628a\u4e0d\u540c\u529f\u80fd\u3001\u4e0d\u540c\u654f\u611f\u65b9\u5411\u6216\u81f4\u52a8\u65b9\u5411\u7684\u591a\u4e2a\u4f20\u611f\u5668\u6216\u6267\u884c\u5668\u96c6\u6210\u4e8e\u4e00\u4f53\uff0c\u6216\u5f62\u6210\u5fae\u4f20\u611f\u5668\u9635\u5217\u3001\u5fae\u6267\u884c\u5668\u9635\u5217\uff0c\u751a\u81f3\u628a\u591a\u79cd\u529f\u80fd\u7684\u5668\u4ef6\u96c6\u6210\u5728\u4e00\u8d77\uff0c\u5f62\u6210\u590d\u6742\u7684\u5fae\u7cfb\u7edf\u3002\u5fae\u4f20\u611f\u5668\u3001\u5fae\u6267\u884c\u5668\u548c\u5fae\u7535\u5b50\u5668\u4ef6\u7684\u96c6\u6210\u53ef\u5236\u9020\u51fa\u53ef\u9760\u6027\u3001\u7a33\u5b9a\u6027\u5f88\u9ad8\u7684MEMS\u3002<\/span><\/div>\n
5\uff09\u591a\u5b66\u79d1\u4ea4\u53c9\uff1aMEMS\u6d89\u53ca\u7535\u5b50\u3001\u673a\u68b0\u3001\u6750\u6599\u3001\u5236\u9020\u3001\u4fe1\u606f\u4e0e\u81ea\u52a8\u63a7\u5236\u3001\u7269\u7406\u3001\u5316\u5b66\u548c\u751f\u7269\u7b49\u591a\u79cd\u5b66\u79d1\uff0c\u5e76\u96c6\u7ea6\u4e86\u5f53\u4eca\u79d1\u5b66\u6280\u672f\u53d1\u5c55\u7684\u8bb8\u591a\u5c16\u7aef\u6210\u679c\u3002<\/span><\/div>\n

<\/p>\n

       MEMS\u53d1\u5c55\u7684\u76ee\u6807\u5728\u4e8e\uff0c\u901a\u8fc7\u5fae\u578b\u5316\u3001\u96c6\u6210\u5316\u6765\u63a2\u7d22\u65b0\u539f\u7406\u3001\u65b0\u529f\u80fd\u7684\u5143\u4ef6\u548c\u7cfb\u7edf\uff0c\u5f00\u8f9f\u4e00\u4e2a\u65b0\u6280\u672f\u9886\u57df\u548c\u4ea7\u4e1a\u3002MEMS\u53ef\u4ee5\u5b8c\u6210\u5927\u5c3a\u5bf8\u673a\u7535\u7cfb\u7edf\u6240\u4e0d\u80fd\u5b8c\u6210\u7684\u4efb\u52a1\uff0c\u4e5f\u53ef\u5d4c\u5165\u5927\u5c3a\u5bf8\u7cfb\u7edf\u4e2d\uff0c\u628a\u81ea\u52a8\u5316\u3001\u667a\u80fd\u5316\u548c\u53ef\u9760\u6027\u6c34\u5e73\u63d0\u9ad8\u5230\u4e00\u4e2a\u65b0\u7684\u6c34\u5e73\u300221\u4e16\u7eaaMEMS\u5c06\u9010\u6b65\u4ece\u5b9e\u9a8c\u5ba4\u8d70\u5411\u5b9e\u7528\u5316\uff0c\u5bf9\u5de5\u519c\u4e1a\u3001\u4fe1\u606f\u3001\u73af\u5883\u3001\u751f\u7269\u5de5\u7a0b\u3001\u533b\u7597\u3001\u7a7a\u95f4\u6280\u672f\u3001\u56fd\u9632\u548c\u79d1\u5b66\u53d1\u5c55\u4ea7\u751f\u91cd\u5927\u5f71\u54cd\u3002<\/span><\/span><\/p>\n


<\/span><\/span><\/p>\n<\/div>\n

       \u5fae\u673a\u7535\u7cfb\u7edf\u662f\u5fae\u7c73\u5927\u5c0f\u7684\u673a\u68b0\u7cfb\u7edf\uff0c\u5176\u4e2d\u4e5f\u5305\u62ec\u4e0d\u540c\u5f62\u72b6\u7684\u4e09\u7ef4\u5e73\u677f\u5370\u5237\u4ea7\u751f\u7684\u7cfb\u7edf\u3002\u8fd9\u4e9b\u7cfb\u7edf\u7684\u5927\u5c0f\u4e00\u822c\u5728\u5fae\u7c73\u5230\u6beb\u7c73\u4e4b\u95f4\u3002\u5728\u8fd9\u4e2a\u5927\u5c0f\u8303\u56f4\u4e2d\u65e5\u5e38\u7684\u7269\u7406\u7ecf\u9a8c\u5f80\u5f80\u4e0d\u9002\u7528\u3002\u6bd4\u5982\u7531\u4e8e\u5fae\u673a\u7535\u7cfb\u7edf\u7684\u9762\u79ef\u5bf9\u4f53\u79ef\u6bd4\u6bd4\u4e00\u822c\u65e5\u5e38\u751f\u6d3b\u4e2d\u7684\u673a\u68b0\u7cfb\u7edf\u8981\u5927\u5f97\u591a\uff0c\u5176\u8868\u9762\u73b0\u8c61\u5982\u9759\u7535\u3001\u6da6\u6e7f\u7b49\u6bd4\u4f53\u79ef\u73b0\u8c61\u5982\u60ef\u6027\u6216\u70ed\u5bb9\u91cf\u7b49\u8981\u91cd\u8981\u3002<\/span><\/p>\n


<\/span><\/p>\n

\u5b83\u4eec\u4e00\u822c\u662f\u7531\u7c7b\u4f3c\u4e8e\u751f\u4ea7\u534a\u5bfc\u4f53\u7684\u6280\u672f\u5982\u8868\u9762\u5fae\u52a0\u5de5\u3001\u4f53\u578b\u5fae\u52a0\u5de5\u7b49\u6280\u672f\u5236\u9020\u7684\u3002\u5176\u4e2d\u5305\u62ec\u66f4\u6539\u7684\u7845\u52a0\u5de5\u65b9\u6cd5\u5982\u538b\u5ef6\u3001\u7535\u9540\u3001\u6e7f\u8680\u523b\u3001\u5e72\u8680\u523b\u3001\u7535\u706b\u82b1\u52a0\u5de5\u7b49\u7b49\u3002<\/span><\/p>\n


<\/span><\/p>\n

\u5fae\u673a\u7535\u7cfb\u7edf\u662f\u6307\u96c6\u5fae\u578b\u4f20\u611f\u5668\u3001\u6267\u884c\u5668\u4ee5\u53ca\u4fe1\u53f7\u5904\u7406\u548c\u63a7\u5236\u7535\u8def\u3001\u63a5\u53e3\u7535\u8def\u3001\u901a\u4fe1\u548c\u7535\u6e90\u4e8e\u4e00\u4f53\u7684\u5fae\u578b\u673a\u7535\u7cfb\u7edf\uff0c\u662f\u4e00\u4e2a\u72ec\u7acb\u7684\u667a\u80fd\u7cfb\u7edf\u3002\u4e3b\u8981\u7531\u4f20\u611f\u5668\u3001\u4f5c\u52a8\u5668\u548c\u5fae\u80fd\u6e90\u4e09\u5927\u90e8\u5206\u7ec4\u6210\u3002<\/span><\/p>\n


<\/span><\/p>\n

\u5fae\u673a\u7535\u7cfb\u7edf\u5177\u6709\u4ee5\u4e0b\u51e0\u4e2a\u57fa\u672c\u7279\u70b9\uff0c\u5fae\u578b\u5316\u3001\u667a\u80fd\u5316\u3001\u591a\u529f\u80fd\u3001\u9ad8\u96c6\u6210\u5ea6\u3002\u5fae\u673a\u7535\u7cfb\u7edf\u3002\u5b83\u662f\u901a\u8fc7\u7cfb\u7edf\u7684\u5fae\u578b\u5316\u3001\u96c6\u6210\u5316\u6765\u63a2\u7d22\u5177\u6709\u65b0\u539f\u7406\u3001\u65b0\u529f\u80fd\u7684\u5143\u4ef6\u548c\u7cfb\u7edf\u5fae\u673a\u7535\u7cfb\u7edf\u3002<\/span><\/p>\n


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