{"id":3423,"date":"2021-11-11T11:01:53","date_gmt":"2021-11-11T03:01:53","guid":{"rendered":"\/\/www.schoolhousefamilies.com\/%e5%8d%95%e6%99%b6%e7%a1%85%e7%89%87-%e7%bb%9d%e7%bc%98%e7%89%87soi\/"},"modified":"2023-06-25T00:13:30","modified_gmt":"2023-06-24T16:13:30","slug":"danjingguipianjueyuanpiansoi","status":"publish","type":"post","link":"\/\/www.schoolhousefamilies.com\/danjingguipianjueyuanpiansoi\/","title":{"rendered":"\u5355\u6676\u7845\u7247\u2014\u2014\u7edd\u7f18\u7247(SOI)"},"content":{"rendered":"
\u7edd\u7f18\u7247(SOI)<\/span><\/strong><\/p>\n \u4e3a\u4e86\u63d0\u9ad8\u96c6\u6210\u7535\u8def\u7684\u96c6\u6210\u5ea6\u548c\u901f\u5ea6,\u964d\u4f4e\u529f\u8017\u5fc5\u987b\u7f29\u5c0f\u5668\u4ef6\u7684\u5c3a\u5bf8\u3002\u4f46\u5f53\u5668\u4ef6\u7684\u5c3a\u5bf8\u7f29\u5c0f\u5230\u4e9a\u5fae\u7c73\u8303\u56f4\u4ee5\u5185\u65f6,\u5e38\u89c4\u7684\u7ed3\u6784\u5c31\u4e0d\u9002\u5e94\u4e86,\u4ece\u800c\u5bfc\u81f4SOI( Silicon On Insulator\u6216Semi- conductor On Insulator)\u7ed3\u6784\u7684\u53d1\u5c55,\u4e5f\u5c31\u662f\u628a\u5668\u4ef6\u5236\u4f5c\u5728\u7edd\u7f18\u886c\u5e95\u4e0a\u751f\u957f\u7684\u7845\u5355\u6676\u5c42\u4e0a\u3002SOI\u7ed3\u6784\u5f00\u59cb\u662f\u9488\u5bf9\u4e9a\u5fae\u7c73CMOS\u5668\u4ef6\u63d0\u51fa\u6765\u4ee5\u53d6\u4ee3\u4e0d\u9002\u5408\u8981\u6c42\u7684\u5e38\u89c4\u7ed3\u6784\u4ee5\u53ca\u5df2\u7ecf\u5e94\u7528\u7684sos\u7ed3\u6784(sos\u53ef\u4ee5\u770b\u6210\u662fSOI\u7684\u4e00\u79cd\u5f62\u5f0f),\u4f46SOI\u7ed3\u6784\u5f88\u5feb\u4e5f\u6210\u4e3a\u5b9e\u73b0\u9ad8\u901f\u96c6\u6210\u7535\u8def\u53ca\u4e09\u7ef4\u96c6\u6210\u7535\u8def\u7684\u65b0\u9014\u5f84(\u4f46\u4e0d\u662f\u6240\u6709\u7684SOI\u7ed3\u6784\u90fd\u53ef\u4ee5\u7528\u6765\u505a\u4e09\u7ef4\u96c6\u6210\u7535\u8def),\u662f\u5f53\u524d\u534a\u5bfc\u4f53\u6750\u6599\u7814\u7a76\u7684\u4e00\u4e2a\u70ed\u70b9\u95ee\u9898\u3002<\/span><\/p>\n <\/span><\/p>\n SOI\u4e0eSOS\u76f8\u6bd4,SOI\u6750\u6599\u7684\u5b8c\u6574\u6027\u6bd4sos\u597d\u5f97\u591a,\u6bd4SOS\u5e94\u7528\u7684\u8303\u56f4\u4e5f\u5e7f\u6cdbCMOS\u7535\u8def\u4e2d\u91c7\u7528SOI\u7ed3\u6784,\u53ef\u4ee5\u51cf\u5c11\u63a9\u853d\u6b21\u6570,\u4e5f\u4e0d\u9700\u8981\u9694\u79bb\u6269\u6563,\u4f7f\u7ebf\u8def\u5e03\u5c40\u7b80\u5316,\u63d0\u9ad8\u96c6\u6210\u5ea6\u3002SOS\u4e2dSi\u4e0eAl2O3\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u4e0d\u5339\u914d,\u7845\u5c42\u5185\u6709\u538b\u7f29\u5e94\u529b\u3002\u6b64\u5916,SO1\u7684\u529f\u8017\u548c\u886c\u5e95\u6210\u672c\u90fd\u6bd4SOS\u4f4e\u5f97\u591a,SOS\u6ca1\u6709\u5b9e\u73b0\u4e09\u7ef4\u5668\u4ef6\u7ed3\u6784\u529f\u80fd\u3002<\/span><\/p>\n<\/div>\n \u4ece\u76ee\u524d\u60c5\u51b5\u6765\u770b,\u6709\u7684SOI\u6280\u672f\u5df2\u521d\u6b65\u8d70\u5411\u5b9e\u7528\u5316,\u53ea\u8981\u80fd\u8fdb\u4e00\u6b65\u514b\u670d\u5de5\u827a\u548c\u6750\u6599\u8d28\u91cf\u95ee\u9898,\u5b9e\u7528\u5316\u662f\u6ca1\u6709\u95ee\u9898\u7684,\u67d0\u4e9bSOI\u6280\u672f\u53ef\u4ee5\u7528\u4e8e\u4e09\u7ef4IC\u7684\u5236\u9020SOI\u7ed3\u6784\u6750\u6599\u5236\u5907\u7684\u65b9\u6cd5\u6709\u5f88\u591a\u79cd,\u4e0b\u9762\u7b80\u8981\u4ecb\u7ecd\u51e0\u79cd\u4e3b\u8981\u7684\u65b9\u6cd5:<\/span><\/span><\/p>\n <\/span><\/p>\n SOI\u6280\u672f\u5df2\u7ecf\u7814\u7a76\u5f88\u591a\u5e74,\u53d6\u5f97\u4e00\u4e9b\u7ed3\u679c,\u5404\u5148\u8fdb\u5de5\u4e1a\u56fd\u90fd\u6295\u5165\u4e0d\u5c11\u529b\u91cf\u8fdb\u884c\u7814\u7a76,\u4e00\u65e6\u83b7\u5f97\u7a81\u7834\u6027\u7684\u8fdb\u5c55,\u5176\u5e94\u7528\u524d\u666f\u662f\u5341\u5206\u5e7f\u9614\u7684\u3002<\/span><\/p>\n <\/p>\n\n\n
\n Diameter<\/span><\/td>\n 4″ <\/span><\/td>\n 5″ <\/span><\/td>\n 6″ <\/span><\/td>\n 8″ <\/span><\/td>\n<\/tr>\n \n Device Layer<\/span><\/td>\n Dopant<\/span><\/td>\n Boron, Phos, Arsenic, Antimony, Undoped<\/span><\/td>\n<\/tr>\n \n Orientation <\/span><\/td>\n <100>, <111><\/span><\/td>\n<\/tr>\n \n Type<\/span><\/td>\n SIMOX, BESOI, Simbond, Smart-cut<\/span><\/td>\n<\/tr>\n \n Resistivity <\/span><\/td>\n 0.001-20000 Ohm-cm<\/span><\/td>\n<\/tr>\n \n Thickness (um)<\/span><\/td>\n 0.2-150<\/span><\/td>\n<\/tr>\n \n The Uniformity<\/span><\/td>\n <5%<\/span><\/td>\n<\/tr>\n \n BOX Layer<\/span><\/td>\n Thickness (um)<\/span><\/td>\n 0.4-3<\/span><\/td>\n<\/tr>\n \n Uniformity<\/span><\/td>\n <2.5%<\/span><\/td>\n<\/tr>\n \n Substrate<\/span><\/td>\n Orientation <\/span><\/td>\n <100>, <111><\/span><\/td>\n<\/tr>\n \n Type\/Dopant<\/span><\/td>\n P Type\/Boron , N Type\/Phos, N Type\/As, N Type\/Sb<\/span><\/td>\n<\/tr>\n \n Thickness (um)<\/span><\/td>\n 300-725<\/span><\/td>\n<\/tr>\n \n Resistivity <\/span><\/td>\n 0.001-20000 Ohm-cm<\/span><\/td>\n<\/tr>\n \n Surface Finished<\/span><\/td>\n P\/P, P\/E<\/span><\/td>\n<\/tr>\n \n Particle<\/span><\/td>\n <10@.0.3um<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
SOI\u7ed3\u6784\u7684\u4f18\u70b9\u5927\u81f4\u53ef\u4ee5\u5f52\u7eb3\u4e3a\u5982\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/span><\/div>\n
<\/span><\/p>\n
<\/span><\/span><\/p>\n
2.CVD\u6a2a\u5411\u751f\u957f<\/span><\/div>\n
3.\u6c27\u79bb\u5b50\u6ce8\u5165\u5f62\u6210SOI\u7ed3\u6784<\/span><\/div>\n
4.\u7845\u7247\u9762\u952e\u5408\u6cd5<\/span><\/div>\n